Preface	6
	Acknowledgements	8
	Contents	9
	1 Introduction to SiC and Thermoelectrical Properties	12
	1.1 Background	12
	1.2 Silicon Carbide	14
	1.3 Growth of SiC	15
	1.4 Thermoelectrical Properties	16
	1.5 High-Temperature SiC MEMS Sensors	18
	References	18
	2 Fundamentals of Thermoelectrical Effect in SiC	21
	2.1 Thermoresistive Effect	21
	2.1.1 Physical Parameters and Definitions in Semiconductors	23
	2.1.2 Single-Crystalline SiC	23
	2.1.3 Polycrystalline SiC	25
	2.1.4 Amorphous SiC	27
	2.2 Thermoelectronic Effects	27
	2.3 Thermocapacitive Effect	28
	2.4 Thermoelectric Effect	29
	2.5 Recent Advances in Characterisation of Thermoelectrical Effects in SiC at High Temperatures	30
	2.5.1 Experimental Set-up for Characterisation of Thermoelectrical Effect	30
	2.5.2 Thermoresistive Effect in Single Layer of SiC	31
	2.5.3 Thermoelectrical Effect in Multi-layers of SiC	39
	2.6 4H-SiC p–n Junctions	41
	2.7 Other Thermoelectrical Effects at High Temperatures	44
	2.7.1 Thermoelectric Effect	44
	2.7.2 Thermocapacitive Effect	46
	References	48
	3 Desirable Features for High-Temperature SiC Sensors	52
	3.1 Sensitivity	52
	3.2 Linearity	54
	3.3 Thermal Time Response	56
	3.4 Low Power Consumption	57
	3.5 Stability and Other Desirable Features	58
	References	59
	4 Fabrication of SiC MEMS Sensors	63
	4.1 Growth and Doping	63
	4.1.1 Growth of SiC	63
	4.1.2 Doping of SiC	65
	4.2 Etching of SiC	65
	4.2.1 Electrochemical Etching	67
	4.2.2 Chemical Etching	67
	4.2.3 Dry Etching or Reactive-Ion Etching (RIE)	68
	4.3 Ohmic and Schottky Contacts to SiC	68
	4.3.1 Ohmic Contact	68
	4.3.2 Schottky Contact	73
	4.4 Fabrication Processes of SiC MEMS Sensors	75
	4.4.1 Surface Micromachining	75
	4.4.2 Bulk Micromachining	76
	4.4.3 Fabrication of MEMS Device with Integrated Cooling System	79
	References	79
	5 Impact of Design and Process on Performance of SiC Thermal Devices	83
	5.1 Substrate Influence	83
	5.2 Doping Influence	84
	5.3 Morphologies	85
	5.4 Deposition Temperature	87
	5.5 Geometry and Dimension	87
	References	88
	6 Applications of Thermoelectrical Effect in SiC	92
	6.1 Temperature Sensors, Temperature Control/Compensation and Thermal Measurement	92
	6.1.1 Thermistors	93
	6.1.2 p–n Junction Temperature Sensors	95
	6.2 Thermal Flow Sensors	96
	6.2.1 Hot-Wire and Hot-Film Flow Sensors	97
	6.2.2 Calorimetric Flow Sensors	101
	6.2.3 Time-of-Flight Flow Sensors	102
	6.3 Convective Accelerometers and Gyroscopes	103
	6.3.1 Convective Accelerometers	104
	6.3.2 Convective Gyroscopes	105
	6.4 Other Applications	105
	6.4.1 Combustible Gas Sensors	105
	6.4.2 SiC MEMS with Integrated Heating, Sensing and Microfluidic Cooling	106
	References	110
	7 Future Prospects of SiC Thermoelectrical Sensing Devices	114
	7.1 Novel Platforms of SiC Films on Insulation Substrates	114
	7.2 Integration of SiC Thermoelectrical Devices with Other Materials and Devices	116
	7.3 SiC Thermal Actuators	117
	7.4 Challenges and Future Developments of SiC Sensing Devices	118
	References	120